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SENTECH Instruments develops, manufactures, and sells worldwide advanced quality instrumentation for Plasma Etching, PECVD, Atomic Layer Deposition, Thin Film Measurement (Spectroscopic Ellipsometry, Spectroscopic Reflectometry and Laser Ellipsometer) and Photovoltaics.

Plasma Etching –SI500

  • ICP-RIE Plasma Etcher SI 500
  • RIE Plasma Etcher Etchlab 200
  • RIE Plasma Etcher SI 591 Compact

PECVD (Plasma Deposition) –

  • ICP Plasma Deposition System SI 500 DDepolab_open
  • PECVD Loadlock System SI 500 PPD
  • PECVD Direct Loading System Depolab 200

Atomic Layer Deposition –

  • Atomic Layer Deposition Systems

Spectroscopic Ellipsometry –SE400

  • SENresearch: Spectroscopic ellisometer family
  • SENpro: Cost-effective spectroscopic ellipsometry
  • SENDIRA: Intrared spectroscopic ellipsometry
  • SENDURO: Automated spectroscopic ellisometry
  • SpectraRay/3: Spectroscopic ellipsometry software

Laser Ellipsometer –RM-1000-2000

  • Laser Ellipsometer SE 400adv
  • CER Ellipsometer SE 500adv
  • Options to be bench top Laser Ellipsometer
  • In situ Laser Ellipsometer SE 401

Reflectometer (FTP) –

  • Spectroscopic reflectometry: RM 1000/2000FTPinline
  • Film Thickness Probe table top reflectometer FTPadv
  • Comprehensive thin film measurement software FTPadv Expert

Measuring tools for :

Crystalline silicon cells –

  • SE 400adv PV
  • SE 800 PV

Thin film solar cells –

  • SenSol
  • RT Inline


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