Electron Microscopy

SNE - 4500 M - High resolution Table-top SEM (x100K)

Performance

Convenience

Specifications

Resolution

5nm (30kV, SE Image)

Magnification

20x - 100,000x

Accelerating Voltage

1 - 30kV (1/5/10/15/20/30)

Detector

Secondary Electrode Image (SE)

Electron Gun

Pre-centered Tungsten Filament Cartridge

Stage Traverse

5-axis System : (X, Y, R, Z, T - Manual)
X, Y Axis : 40mm / R-axis : 360°
Z-axis : 0 - 35mm / Tilt-axis : 0 - 45°
* Image Shift : ±150um

Max. Sample Size

80mm in Diameter x 35mm in Height

Automation Function

Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness

Vacuum Mode

High Vacuum (Low Vacuum Option)

Vacuum Pump

Rotary Pump / Turbo Molecular Pump (Full Automation)

Main Unit

390(W)x380(D)x560(H)mm, 88kg

Controller Unit

390(W)x325(D)x560(H)mm, 37kg

Rotary Pump

400(W)x160(D)x340(H)mm, 24kg

SNE - 3200 M - Highly Efficient Table-top SEM (x60K)

Performance

Convenience

Specifications

Resolution

15nm (30kV, SE Image)
20nm (30kV, BSE Image)

Magnification

20x - 60,000x

Accelerating Voltage

1 - 30kV (1/5/10/15/20/30)

Detector

Secondary Electron Image (SE)
Backscattered Electron Image (SBE)

Electron Gun

Pre-centered Tungsten Filament Cartridge

Stage Traverse

3-axis System : (X, Y, R, Z, T - Manual)
X, Y Axis : 35mm / R-axis : 360°
* Image Shift : ±150um
* CCD Camera Installed in the Chamber
* T-Axis : 0 - 45° (Option)

Max. Sample Size

70mm in Diameter x 30mm in Height

Automation Function

Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness

Vacuum Mode

High & Low Vacuum

Vacuum Pump

Rotary Pump / Turbo Molecular Pump (Full Automation)

Main Unit

390(W)x380(D)x560(H)mm, 83kg

Controller Unit

390(W)x325(D)x560(H)mm, 37kg

Rotary Pump

400(W)x160(D)x340(H), 24kg

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