Turbo Pumps


Turbo Pumps – the pacesetters among vacuum pumps

Vacuum technology is essential for making many high-tech products used in everyday life. Numerous applications in research and industry, in fact, need a vacuum with an extremely low absolute pressure (high vacuum). Turbo Pumps have established themselves globally as the technological standard, having acquired their name from their turbine cousins. High-speed rotors with up to 90,000 rpm generate the pressure conditions required for your application. This allows a vacuum of up to 10-11 mbar to be generated in the high and ultra-high vacuum range.

Turbo Pumps for perfect vacuum solutions to meet the highest requirements

Pfeiffer Vacuum turbo pumps are available for pumping speeds of between 10 and 2,700 liters per second. These pumps will win you over with their high cost-efficiency and flexibility. Pfeiffer Vacuum turbo pumps with their optimized reliability use proven bearing systems which are available in two different options – a hybrid bearing system with a combination of a ceramic ball bearing on the forevacuum side and a permanently magnetic radial bearing on the high vacuum side, and a fully, active magnetic bearing system in which the rotor is levitated with no contact or wear at all. Thanks to the sophisticated rotor design, extremely high pumping speed, critical backing pressure and gas throughput values are achieved as well as very good compression values for light gases.

Pfeiffer Vacuum turbo pumps stand for safety

Modern turbo pumps attain peripheral speeds of over 400 meters per second. This translates to a correspondingly high kinetic rotor energy which, if the rotor and stator were to touch, would transfer within a fraction of a second to the housing and the pump’s anchor system too. The stability of the outer casing of the pump is thus of vital importance and is tested both theoretically and experimentally. Our turbo pumps are certified to UL 61010 and/or Semi S2. Besides the mechanical safety, the certification encompasses fire protection and two-fold protection against excess rotation speed, which Pfeiffer Vacuum has developed together with TÜV Rheinland.

Key customer benefits

Vacuum technology is often a key factor for successfully running production processes from start to finish. The costs incurred by faulty batches or production outages can easily run to millions of euros, depending on the application. This makes it all the more important to use components that provide maximum reliability. Today, it is not uncommon for turbo pumps to reach an operating lifetime of up to 100,000 hours. This translates to an uninterrupted running time of some eleven years. During this time, the pump should result in as few scheduled interruptions as possible for maintenance or service work. Pfeiffer Vacuum turbo pumps have extended diagnostic functions to meet this requirement. With the help of this data, maintenance is carried out based on the pump status. Any maintenance required is predictable and so can be scheduled by the user.

Coupled with the unique fact that oil and bearing changes can be carried out on site, this results in maximum uptime. The turbo pumps’ integrated electronic drive unit significantly reduces cabling costs. State-of-the-art drive technology minimizes energy consumption while at the same time offering versatile control options. The IP 54 protection class design makes these pumps supremely suitable for industrial environments. Their compact design makes for easy integration even where space is at a premium. To minimize costs, there are various electronic drive units to choose from for each pump size. Even the weight factor has been subjected to scrutiny: a turbo pump with a pumping speed of 250 liters per second weighs in at a mere 6 kilograms. The wide range of uses for Pfeiffer Vacuum turbo pumps includes not only analytical, vacuum process and semiconductor technology but also coating, research and development and industrial applications.


With the production of many products in everyday life and in many areas associated with engineering research, vacuum technologies play a crucial role. The turbo pump is of extreme importance providing pure processing conditions.

Examples for applications can be found in many different areas:

  • Analytics (mass spectrometry, electron microscopy, and many more)
  • Semiconductor industry (electronic components, integrated circuits (ICs), solar cells and many more)
  • Optical/glass industry (heat protection, anti-reflection, reflection, optical filter coatings and many more)
  • Coating technology (surface protection, decorative coatings, displays, screens and many more)
  • Vacuum metallurgy (vacuum soldering, vacuum sintering, vacuum alloys, vacuum furnaces and many more)
  • Leak detection (vacuum systems, vehicle fuel tanks, airbag cartridges, packages)
  • Research facilities (nuclear particle physics, fusion research, Laser applications and many more)
  • Lamp industry (lamp production and many more)