Trillium specializes in the manufacture and maintenance of cryopumps, cryogenic cold heads, and closed cycle helium compressors. With world-class quality and proven designs, Trillium has a firmly established positive reputation in semiconductor manufacturing, research and academia, life science, and energy industries.



Trillium manufacture and refurbish more than 2,500 cryopumps, helium compressors, and cryogenic cold heads per year. All products, new and refurbished, are backed by a global one year warranty which includes competent local service support through Scitek.

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