Electron Microscopy

SNE - 4500 M Plus - High resolution Table-top SEM (x150K)

Performance

Convenience

Specifications

Resolution

5nm (30kV, SE Image)
8nm (30kV, BSE Image)

Magnification (Live)
Magnification (Saved)

20x - 150,000x
> 500,000X (Theoretical)

Accelerating Voltage

1 - 30kV (1/5/10/15/20/30)

Detector

Secondary Electrode Image (SE)
Backscattered Electron Image (BSE)
4 Quadrant BSE - full on/off control

Electron Gun

Pre-centered Tungsten Filament Cartridge

Stage Traverse

5-axis System : (X, Y, R, Z, T - Motorized)
X, Y Axis : 40mm / R-axis : 360°
Z-axis : 0 - 40mm / Tilt-axis : 15 - 90°
* Image Shift : ±150um

Max. Sample Size

80mm in Diameter x 50mm in Height

Automation Function

Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness

Vacuum Mode

High Vacuum (Conductive)
Low Vacuum (Charge Reduction)

Vacuum Pump

Rotary Vane Pump (standard)
Pfeiffer HiPace Turbo Molecular Pump (Full Automation)

Main Unit

390(W)x380(D)x560(H)mm, 88kg

Controller Unit

390(W)x325(D)x560(H)mm, 37kg

Rotary Pump

400(W)x160(D)x340(H)mm, 24kg

SNE - 4500 M - High resolution Table-top SEM (x100K)

Performance

Convenience

Specifications

Resolution

5nm (30kV, SE Image)

Magnification

20x - 100,000x

Accelerating Voltage

1 - 30kV (1/5/10/15/20/30)

Detector

Secondary Electrode Image (SE)

Electron Gun

Pre-centered Tungsten Filament Cartridge

Stage Traverse

5-axis System : (X, Y, R, Z, T - Manual)
X, Y Axis : 40mm / R-axis : 360°
Z-axis : 0 - 35mm / Tilt-axis : 0 - 45°
* Image Shift : ±150um

Max. Sample Size

80mm in Diameter x 35mm in Height

Automation Function

Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness

Vacuum Mode

High Vacuum (Low Vacuum Option)

Vacuum Pump

Rotary Pump / Turbo Molecular Pump (Full Automation)

Main Unit

390(W)x380(D)x560(H)mm, 88kg

Controller Unit

390(W)x325(D)x560(H)mm, 37kg

Rotary Pump

400(W)x160(D)x340(H)mm, 24kg

SNE - 3200 M - Highly Efficient Table-top SEM (x60K)

Performance

Convenience

Specifications

Resolution

15nm (30kV, SE Image)
20nm (30kV, BSE Image)

Magnification

20x - 60,000x

Accelerating Voltage

1 - 30kV (1/5/10/15/20/30)

Detector

Secondary Electron Image (SE)
Backscattered Electron Image (SBE)

Electron Gun

Pre-centered Tungsten Filament Cartridge

Stage Traverse

3-axis System : (X, Y, R, Z, T - Manual)
X, Y Axis : 35mm / R-axis : 360°
* Image Shift : ±150um
* CCD Camera Installed in the Chamber
* T-Axis : 0 - 45° (Option)

Max. Sample Size

70mm in Diameter x 30mm in Height

Automation Function

Auto Start, Auto Focus, Auto Stigmator, Auto Contrast & Brightness

Vacuum Mode

High & Low Vacuum

Vacuum Pump

Rotary Pump / Turbo Molecular Pump (Full Automation)

Main Unit

390(W)x380(D)x560(H)mm, 83kg

Controller Unit

390(W)x325(D)x560(H)mm, 37kg

Rotary Pump

400(W)x160(D)x340(H), 24kg

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