Oil Diffusion Pumps

Diffusion

Oil Diffusion Pumps

The oil diffusion pump is operated with an oil of low vapor pressure. Its purpose is to achieve higher vacuum that is possible by use of positive displacement pumps alone. Although it is used majority of the time at high-vacuum ranges (down to 10-9 mbar), diffusion pumps normally today can produce up to 10-10mbar when properly used with modern fluids and accessories.

An oil diffusion pump is quite attractive given it can perform at high and ultra-high vacuum systems and is able to perform high pumping speeds for all gases and at a relatively low cost per unit pumping speed in comparison to other vacuum pump systems. Diffusion pumps cannot discharge directly into the atmosphere, so a mechanical forepumps is typically required to maintain outlet pressures of approximately 0.1 mbar. They have many applications in high-vacuum technology, for example in metallising systems, metallurgical facilities, vacuum ovens, laboratory pumping stations and many more.

The tried and tested diffusion pump technology of the former Balzers AG has been developed further after this business area was taken over by HSR AG. In keeping with our standards, our customers can also expect the highest stability from these products.

Features

  • pump range available in the nominal sizes from DN 40 to DN 1000
  • air and water cooled oil diffusion pumps
  • high volume flow rates
  • good pre-vacuum stability
  • low blowing gas backflow
  • continual self-cleaning of the fuel in the purification zone

Diffusion pumps – size DN 040

The powerful HSR small diffusion pumps are available air or water cooled, have a vacuum flange DN 040 ISO-KF and are fitted with an integrated baffle as well as a thermal circuit breaker.

Features

  • integrated water baffle
  • compact construction
  • available either with air or water cooling
  • ideal for mineral oil, silicone oil or pentaphenyl ether

Diffusion pumps with integrated water baffle – sizes DN 63 to DN 250

This range has the significant characteristic of having a visually non-transparent baffle integrated into the pump casing. The pump casings are made of non-rusting stainless steel and the extendable spray system for cleaning is made of pressed aluminium. A thermal circuit breaker built into the pump casing prevents overheating of the fuel. The water-cooling circuit is composed of a rust-resistant steel tube fixed to the pump casing.

Features

  • compact construction
  • integrated water baffle
  • pump body and adapter flange made of rust-free steel
  • ideal for mineral oil, silicone oil or pentaphenyl ether

Diffusion pumps with cold cap or baffle cap – sizes DN 320 to DN 1000

To meet the demands of the market, HSR produces a range of larger, water-cooled diffusion pumps. This range of pumps possesses a volume flow rate from 5’000 to 50’000 l/sec and is particularly appropriate for industrial high-vacuum applications.

For applications in the working-range of 10-4 mbar, our diffusion pumps are fitted with the so-called baffle cap which, beside its advantages regarding high volume flow rate and high gas throughput, also has a low fitting height and an exceptionally economical price.

Features

  • robust design
  • low end-pressure
  • integrated cold cap or baffle cap
  • low energy usage through pre-vacuum baffle
  • short warming-up phase
  • ideal for mineral oil, silicone oil or pentaphenyl ether