Parylene Coating

Parylene = Nonpareil surface protection

In many cases, a parylene coating is the ideal solution for protecting high-quality components, modules or devices. Parylene is a group of polymers that are chemically precisely referred to as para-xylylene.

In one applicable, only for this class of materials processing technology, virtually transparent protective layers can be produced, that are:

  • regardless of the substrate contour a constant layer thickness of less than 1 micron deviation.
  • from 1 micron reliable "pinhole-free"
  • thermally stable (depending on the parylene type)
  • chemically inert (resistant to a variety of chemicals)
  • resistant to environmental influences and UV radiation
  • adhere very good on plasma cleaned and pre-treated surfaces
  • conformal cover  complex contours, edges, slots, cavities

Coating Equipment provided by Diener

The unique process of requires a very special plant technology, which is only designed for parylene coatings.

In design and manufacture of equipment, Diener electronic can refer to its experience from the production of more than 6000 low-pressure plasma systems, and rely on a perfect vacuum / electronics and control technology. 

Parylene Systems provided by Diener

Parylene coating machines are basically vacuum systems. Thus, they include in each case a vacuum‑tight and pressure‑tight vacuum chamber and a vacuum pump. With approximately 0.02 -0.1 mbar, the working pressure is not particularly low. To obtain a good layer quality, it is desirable that foreign molecules are removed as far as possible. High quality seals, avoidence of out-gassing from components and a powerful vacuum pump, are necessary to reach good coating conditions.

Between the vacuum chamber and the vacuum pump a cold trap is installed, in order to polymerize the scraps of the parylene monomers, which are sucked out of the vacuum chamber. The polymerization of monomers inside the vacuum pump could cause a damage there.

A parylene layer is forming on all cold surfaces in the vacuum chamber. Components, that should not be coated, have to be heated (especially sensors). Parylene, which is polymerized on the chamber walls, substrate carriers, in the cold trap, in lines, etc., is lost and have to be removed by mechanical cleaning. This is one of the reasons why parylene coatings are so expensive. The economic efficiency can be optimized, by putting so many coating goods as possible into the chamber. Therefore, Diener electronic offers a differentiated program of different plant sizes. This gives the user the ability to make optimal use of the chamber volume regarding its part geometry. Moreover, Diener electronic offers a variety of fixtures, which allow optimum utilization of the chamber volume.


Parylene P6 - Coating System (Diener)

Parylene P30 - Coating System (Diener)

Parylene P6 provided by Diener

Parylene P6 - Technical Data

Parylene P6 - Brochure Download

Parylene P30 provided by Deiner

Parylene P30 - Technical Data

Parylene P30 - Brochure Download